Main Article Content

Abstract

The effect of impurity atoms of gallium and antimony on the concentration of optically active oxygen in the silicon lattice is studied. It is shown that the oxygen concentration in silicon samples doped with gallium decreases by 87.2%, doped with antimony decreases by 99.2%, and in the case of doping with gallium and antimony decreases simultaneously only by 28.7%. These results can be explained by the chemical interaction of gallium and antimony atoms, which leads to the restoration of the oxygen concentration in optical active centers.

Keywords

diffusion silicon gallium antimony oxygen

Article Details

How to Cite
Isakov, B. O., Rakhmonov, B. R., & Subkhonberdiev, S. N. (2022). Influence of Impurity Atoms of Gallium and Antimony on the Concentration of Optically Active Oxygen in the Silicon Lattice. International Journal on Orange Technologies, 4(6), 57-60. Retrieved from https://journals.researchparks.org/index.php/IJOT/article/view/3146

References

  1. 1. М.Г. Мильвидский, В.В. Чалдышев, ФТП, 32 (5) (1998).
  2. 2. M.K. Bakhadyrkhanov, G.Kh. Mavlonov, S.В. Isamov, Kh.M. Iliev, K.S. Ayupov, Z.M. Saparniyazova, S.A. Tachilin, Inorganic Materials. 2011. Vol. 47, No. 5, pp. 479-483.
  3. 3. М.К. Бахадирханов, С.Б. Исамов, ЖТФ, 91 (11) 1678-1684, (2021). DOI:10.21883/JTF.2021.11.51528.60-21
  4. 4. М.О.Турсунов, Э.Ю.Тураев, Знания и наука в сурхандарье. №2(03)/2021. 10-14. (2021).
  5. 5. М.К. Бахадирханов, Н.Ф. Зикриллаев, С.Б. Исамов, Х.С. Турекеев, С.А. Валиев. ФТП, 56 (2), 199-203, (2022). DOI: 10.21883/FTP.2022.02.51962.9666
  6. 6. Ш.Б. Утамуродова, P.M. Эргашев, Х.Ж. Матжонов, Физика и полупроводников и микроэлектроника. Тошкент. 1 (1), 27-31, (2019).DOI 10.37681/2181-9947-2019-1
  7. 7. M.K. Bakhadirkhanov, Sh.I. Askarov, N. Norkulov. Phys. Status Solidi A, 142, 339 (1994).
  8. 8. М.Б. Бабич, Н.И. Белецкан, Е.Ф. Венгер, Кислород в монокристаллах кремния (Интерпрес, Киев, 1997), с. 24-29.
  9. 9. Kazuhisa Torigoe, Toshiaki Оno, Journal of Applied Physics. Vol.10, No. 045019, pp. 1-5, (2020).
  10. 10. Hiroshi Shirai. J. Electrochem. Soc., Vol. 138, No. 6, June 1991. The Electrochemical Society, Inc.
  11. 11. А.С. Леньшин, ФТП, 52 (3) (2018). DOI: 10.21883/FTP.2018.03.45619.8462
  12. 12. В.П. Маркевич, Л.И. Мурин, J.L. Lindstrom, M. Suezawa, ЖТФ, 34 (9), (2020).
  13. 13. В.В. Привезенцев, А.П. Сергеев, В.С. Куликаускас, Д.А. Киселев, А.Ю. Трифонов, А.Н. Терещенко, ФТП, 54 (12), 1376-1381, (2020). DOI:10.21883/FTP.2020.12.50242.9501a